MEMS Microphone Array Sensor for Air-Coupled Impact-Echo
نویسندگان
چکیده
منابع مشابه
MEMS Microphone Array Sensor for Air-Coupled Impact-Echo
Impact-Echo (IE) is a nondestructive testing technique for plate like concrete structures. We propose a new sensor concept for air-coupled IE measurements. By using an array of MEMS (micro-electro-mechanical system) microphones, instead of a single receiver, several operational advantages compared to conventional sensing strategies in IE are achieved. The MEMS microphone array sensor is cost ef...
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Combining the impact-echo (IE) method with air-coupled sensors has high potential to implement an efficient non-destructive testing system for concrete structures. By using microphones as sensors air-coupled IE offers significant advantages in terms of equipment costs and acquisition speed since no direct coupling of delicate and expensive contact-transducers is necessary. However, problems rel...
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In this paper, a model for MEMS capacitive microphone is presented for integrated circuits. The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s150714932